Xlith - Gesellschaft für Hochauflösende Lithografie mbH
xlith offers services and products related to pattern generation in the 10nm … 250nm regime with applications in microelectronics, photonics and nanotechnology.
The company was founded 1997 by Dr. Bernd Maile. xlith offered the first commercial direct write e-beam lithography service on Si, GaAs, InP, SiC, GaN, Diamond, Fused Silica and other substrates. The company builds upon more than 35 years of experience in ultra-high resolution electron beam lithography. xlith has served many demanding customers in industry and academia.
The brand names:
- xlith®
- extreme lithography®
- we know how to write nanometer®
are worldwide registered trademarks of xlith GmbH / Germany.
xlith has adopted a fully certified quality management system according to ISO 9001:2015.
Quelle: https://xlith.com/index.php/about-xlith/ (10.04.2023)
